Electron signals, primary damage, and a collision cascade
Two distinct mechanisms are shown separately: electron scattering produces measurable electron and photon signals; ion or neutron irradiation produces primary knock-on atoms, recoil cascades, vacancies, and interstitials.
- Primary / backscattered electronThe incident electron may leave after elastic deflection
- Elastic scatteringChanges direction with little energy loss
- Inelastic scatteringTransfers energy through excitation or ionization
- Emitted signalsSecondary electrons, characteristic X-rays, and material-dependent optical photons
- Active mechanism
- Electron–solid signals
- Current stage
- Primary electron enters the solidLabels and paths belong only to the active mechanism
- Detected outputs
- BSE · SE · X-ray · optical photonOptical emission depends on the target material
- Status
- Explanatory schematicNo illustrative path or count is presented as measured data
